Abstract
Recently, there has been interest in the fabrication of multiple Quartz Crystal Microbalances (QCMs) on a single substrate, to create a sensor array. However, such devices are ultimately subject to the limitations of the QCM configuration, requiring electrodes and wires on the sensing surface of the crystal substrate, resulting in a cumbersome arrangement that is unable to detect electrical property changes. The Lateral Field Excited (LFE) sensor is a novel sensing device that only requires electrodes on the backside of the substrate. With a bare sensing surface, the LFE sensor is a better choice for implementing a sensor array. The purpose of this paper is to report on the fabrication and testing of two independent LFE devices on a single substrate. The individual LFE Elements were shown to respond to both electrical and mechanical property changes. The crosstalk between the LFE Elements was minimal.
Published Version
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