Abstract
We have observed strong emission lines at 5.27 and 5.12 eV at room temperature in cathodoluminescence spectra from homoepitaxial diamond films grown by step-flow mode prepared with microwave plasma assisted chemical vapor deposition. The temperature dependence of integrated intensity of the emission lines indicates that they are attributed to free-exciton recombination radiation associated with a transverse optical phonon and its replica. These results have demonstrated the superior crystalline quality of the homoepitaxial diamond films grown by the step-flow mode.
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