Abstract
We have continued to investigate different diamond single crystal substrates to assess their suitability for the growth of homoepitaxial diamond. Surface topography and defect microstructure of the resulting films are two important qualifiers for the choice of a suitable substrate. Previously developed methods to prepare plan-view TEM samples from bulk diamond substrates and homoepitaxial films have been employed. This contribution describes some of our most recent observations of the surfaces andmicrostructure of natural and synthetic diamond single crystals and homoepitaxial diamond thin films using SEM and TEM - including spatially resolved cathodoluminescence (CL) results.Figs. 1 and 2 show TEM micrographs taken from a (100) natural type Ila diamond crystal and a (100) synthetic type lb diamond that have been ion milled to electron transparency. The mottled background contrast observed in both images which has been observed previously and is believed to result from the extended ion milling used to produce these thin foils.
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