Abstract
It is well known that a major barrier to quantitative energy dispersive (EDS) measurements of thin films is the background X-radiation generated from stray electrons and X-rays from a variety of internal sources. A number of sources have been reported in a variety of microscopes and there is disagreement over their relative importance. Clearly the sources from each type of microscope must be systematically investigated and suppressed. We report here one such study of a JEM 100C/SEG microscope. Although our data are specific to this instrument, analogous results should be obtained from other analytical transmission microscopes. The major sources of spectral background in the JEM 100C were found to be: 1) the fixed condenser (Cl) aperture, 2) the variable condenser (C2) aperture, and 3) the specimen holder. Other potential background sources such as the objective lens pole pieces and the anticontamination device did not contribute a measurable signal. Still others, such as the objective aperture, could be eliminated simply by prudent operation (e.g. removal during EDS counts).
Published Version
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