Abstract
A 200 kV ultrahigh resolution analytical electron microscope (UHRAEM), JEM-2010, enables both ultrahigh resolution imaging with a theoretical point resolution of 0.194 nm and nm-area analysis. In this paper, its preliminary data for x-ray analysis (Energy Dispersive X ray Spectroscopy: EDS) and its application data will be shown.An objective lens polepiece has been designed to minimize the spherical aberration coefficient (Cs) of the prefield and thereby increase the probe current in small probe size for nm-area EDS analysis. Measured values of Cs and chromatic aberration coefficient (Cc) are 0.5 mm and 1.0 mm, respectively. Fig. 1 shows a theoretical relation between the illumination angle and probe size of this objective lens on the assumption that the brightness of electrons is 6×106A/cm2• str in a LaB6cathode. This calculation shows that an electron probe smaller than 1 nm in diameter is available even with a probe current of 10 pA.
Published Version
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