Sensitivity Analysis of Load Carrying Capacity in AFM-based Manipulation

Abstract

In this paper, the sensitivity of cantilever parameters on load carrying capacity in nanomanipulation process is investigated for atomic force microscope (AFM) nanorobot. Due to limitations in real time control for nanomanufacturing process, predicting possibility of the manipulation process is desirable. Main limitation caused by cantilever's geometry. Considering the relationship between cantilever twist angle with its geometry, maximum allowable particle size and therefore load carrying capacity can be found. Finally the effect of variation of four geometrical parameters such as cantilever's length(L), width(W), thickness(T) and probe's height(H) on load carrying capacity is estimated and also simulated, in order to design and choose appropriate cantilever for accurate and successful pushing and assembly purposes.