Abstract
Resonant properties of the three-layer metallic cantilevers with 40-120 nm thickness were investigated. Two types of cantilevers were fabricated: Cr/Al/Cr and Ti/Al/Ti. Dependencies of the fundamental resonant frequency and Q-factor on the cantilever length, width and thickness were experimentally obtained. The experimental data analysis and the comparison with the theoretical predictions were performed. Dependence of material properties on the cantilever thickness was not observed. Energy losses in the surface layer of the cantilever were the dominant energy loss mechanism.
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