Abstract

Coaxially periodic ZnO/ZnMgO core-multishell nanowire (NW) heterostructures were grown via a metal organic chemical vapor deposition method. We investigated their electrical properties via the application of two locally resolved electrical scanning probe microscopy techniques, i.e., scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy (SSRM), following a planarization process. As a result, ZnO and ZnMgO layers can be unambiguously distinguished by both techniques on NWs with diameters <1 μm and the smallest layer thickness of 10 nm, where a higher free carrier concentration along with a low resistivity is revealed for the ZnO regions in comparison to ZnMgO portions, as expected. This work demonstrates the high capability of SCM/SSRM as supplementary and effective tools for probing local electrical properties within functional complex quasi-1D heterostructures.

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