Abstract
This article examines a cross-shaped design element of a linear acceleration and angular velocity sensor with three sensitivity axes. Variants of changes in the suspension design of the linear acceleration and angular velocity sensor are presented. The parameterized geometry of the gyroscope-accelerometer is modeled based on the ANSYS software package. The dependence of inertial mass movements on changes in the parameters of the cross-shaped gyroscope-accelerometer element is obtained.KeywordsMEMSGyroscopeAccelerometerANSYS
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