Abstract
AbstractThe advances in the use of a remote plasma in combination with a rapid radiative reactor in plasma‐enhanced (PE) CVD is presented here. The characteristics and parameters of this system are fully analyzed and compared with conventional CVD growth methods. Growth of multi‐ and single‐walled carbon nanotubes (CNTs) at low temperatures with high quality and reproducibility has been achieved in this way. Further, a new catalytic system, which gives dense multi‐wall CNTs on metal substrates, is presented.
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