RELATIONSHIP BETWEEN ELECTRONIC MOLAR POLARIZABILITY AND SUPER LOW DIELECTRIC CONSTANT IN B 2O 3-BeF 2-C GLASS SYSTEMS

Abstract

Low polarizability B 2O 3-BeF 2-C glass-systems were investigated in regard to the super low dielectric constant and dielectric loss. The experimental data showed that the low dielectric properties of these glasses are due to the low electronic molar polarizability calculated from Clausius–Mosotti's equation. They showed the super low dielectric constants ϵ ∞ 2.5 to 3.4, the dielectric loss tanδ 0.002–0.007 from 100 Hz to 1 GHz, the molar polarizability α m 43.5×10 −25 cm 3 to 64.2×10 −21 cm 3 and flow points T f 570–605°C. These glasses have the potential to reflow at lower temperature than borophosphosilicate glasses without crystallization during the process of device planarization. They are compatible with aluminum multilevel interconnection.