Regrowth-free single-mode quantum cascade lasers with power consumption below 1 W

Abstract

We report on single-mode distributed-feedback quantum cascade lasers emitting at 4.8 μm with continuous-wave threshold power consumption as low as 0.76 W at 20 °C and 0.98 W at 50 °C. Following growth of the laser active region and semiconductor cladding layers by a single molecular beam epitaxy process, devices with 4-μm-wide ridges and vertical sidewall gratings were fabricated using plasma etching and standard dielectric and metal deposition processes. In terms of mode stability, output power, and efficiency, we show that lasers with 1-mm cavity length and high-reflectivity back-facet coatings can match the performance of buried heterostructure devices, but with the advantage of requiring only a single epitaxial growth step.