Abstract
A new method to realize the optical perfect shuffle (PS) with a microoptical array element is presented in this paper. The whole process is simulated by computer, and parameters of the structure to fabricate the experimental component are given. The microoptical array element has been fabricated by introducing very large scale integration (VLSI), stepping photolithography and reactive iron etching (RIE), which can realize 8-channel PS transformation. Experiments, tests and analysis have been done using the array element. The experimental results show that the method proposed in this paper agrees well with theoretical expectation. This success of the experiment lays a good foundation for us to do further research on realization of optical switching and communication through cascade multilevel PS interconnection.
Published Version
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