Abstract
In this paper, a binary optical array element which can realize 8-channel PS transformation is fabricated with very large scale integration (VLSI), stepping photolithography and reactive ion etching (RIE). Using the element, we perform experiments of the PS transformation, tests and analysis. The efficiency and cross talk of each channel are measured when only one channel has been reserved while other channels have been closed. The result indicates that the method proposed to realize the PS transformation by using the micro-optical array element agrees well with theoretical expectation. This success of the experiment lays a good foundation for us to do further research on optical transformation through multilevel interconnection.
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