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Abstract
The effect of the difference in the reaction mechanisms of the titanium source molecules on film quality was investigated in liquid source metalorganic chemical vapor deposition of (Ba,Sr)TiO3 (BST) films. The optimum deposition condition was significantly dependent on the alkoxy moiety of the mixed titanium alkoxide/diketonate compounds such as Ti(t-BuO)2(DPM)2 [bis(tert-butoxy)bis(dipivaloylmethanato)titanium] and Ti(i-PrO)2(DPM)2 [bis(iso-propoxy)bis(dipivaloylmethanato)titanium]. The liquid source delivery was found to be accompanied by local distortion and/or decomposition in the iso-propoxy moieties of Ti(i-PrO)2(DPM)2; no corresponding phenomena occurred in the case of Ti(t-BuO)2(DPM)2. In order to clarify the origin of this dependence, we analyzed the reaction mechanisms of the individual titanium sources by in situ infrared absorption spectroscopy. The chemical stability of the alkoxy moiety of the titanium source determines the reactivity of the whole molecule, which significantly influences on the crystallinity of the resultant BST films.
Published Version
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