Abstract

A comparative study of the morphology and piezoelectric response of island and continuous perovskite thin PZT films deposited on a platinized silicon substrate Si/SiO2/TiO2/Pt was carried out. It was shown that the self-polarization value of micron-size island films was about 1.4 times higher than that of continuous films. It is assumed that the difference is due to the relaxation of tensile mechanical stresses caused by silicon substrate at the island periphery.

Highlights

  • Composition of the films corresponded the morphotropic phase boundary with elemental ratio of Zr/Ti = 53.5/46.5

  • The structural, ferroelectric and piezoelectric properties of thin polycrystalline Pb(Zr,Ti)O3 (PZT) films grown by RF magnetron sputtering have been studied

  • The films were fabricated in two stage process on Pt/TiO2/SiO2/Si substrate

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Summary

Introduction

Radial non-uniform piezoelectric response of perovskite islands in thin PZT films S.V. Senkevich1,3, D.A. Kiselev2,3,V.V. Osipov1,3, V.P. Pronin3 The structural, ferroelectric and piezoelectric properties of thin polycrystalline Pb(Zr,Ti)O3 (PZT) films grown by RF magnetron sputtering have been studied.

Results
Conclusion

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