Abstract
A comparative study of the morphology and piezoelectric response of island and continuous perovskite thin PZT films deposited on a platinized silicon substrate Si/SiO2/TiO2/Pt was carried out. It was shown that the self-polarization value of micron-size island films was about 1.4 times higher than that of continuous films. It is assumed that the difference is due to the relaxation of tensile mechanical stresses caused by silicon substrate at the island periphery.
Highlights
Composition of the films corresponded the morphotropic phase boundary with elemental ratio of Zr/Ti = 53.5/46.5
The structural, ferroelectric and piezoelectric properties of thin polycrystalline Pb(Zr,Ti)O3 (PZT) films grown by RF magnetron sputtering have been studied
The films were fabricated in two stage process on Pt/TiO2/SiO2/Si substrate
Summary
Radial non-uniform piezoelectric response of perovskite islands in thin PZT films S.V. Senkevich1,3, D.A. Kiselev2,3,V.V. Osipov1,3, V.P. Pronin3 The structural, ferroelectric and piezoelectric properties of thin polycrystalline Pb(Zr,Ti)O3 (PZT) films grown by RF magnetron sputtering have been studied.
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IOP Conference Series: Materials Science and Engineering
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
