Abstract
Tin oxide films were prepared by electron beam evaporation of pellets of Specpure SnO 2 in the presence of added oxygen. By optimizing the deposition conditions, transparent and conducting tin oxide films exhibiting the structural characteristics of a predominant SnO 2 phase were produced. The effect of annealing the films in air was also studied. The lowest resistivity obtained was 7.5 × 10 −4 Ω cm , with a visible transmittance of over 90%. The properties studied to characterize the films were (1) structure by X-ray diffraction and transmission electron microscopy; (2) resistivity, Hall mobility and carrier concentration; (3) optical transmission and band gap. Films were also subjected to reduction tests by exposure to a hydrogen plasma to determine their suitability as electrodes for hydrogenated amorphous silicon solar cells.
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