Abstract
Highly (100)-oriented PbTiO 3 /(Pb 0.90 La 0.10 )Ti 0.975 O 3 /PbTiO 3 multi-layer films were prepared on the PbO x /Pt(111)/Ti/SiO2/Si(100) substrates at the temperature of 600°C by RF magnetron sputtering. The thickness of PbO x buffer layer plays a significant role on the phase purity, and the PbTiO 3 layer plays an important role in improving the properties of the multi-layer films. Highly (100)-orientated PbTiO 3 /(Pb 0.90 La 0.10 )Ti 0.975 O 3 /PbTiO 3 multi-layer film possesses good ferroelectric properties with remnant polarization 2P r = 44.1 μC/cm 2 . The pyroelectric coefficient of the film at room-temperature is 2.425 ×10 −8 C/cm 2 .K. The results indicated that the highly (100)-oriented PbTiO 3 /(Pb 0.90 La 0.10 )Ti 0.975 O 3 /PbTiO 3 film possesses larger remnant polarization together with larger pyroelectric coefficient at room temperature.
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