Abstract
An epitaxial BaTiO 3 thin film was prepared on LaAlO 3 substrates using metal naphthenates by coating-pyrolysis (CP) process. The amorphous films pyrolyzed were crystallized by heat treatment under low oxygen partial pressure at 950 °C. Crystallinity, epitaxy, and crystal structure of the BaTiO 3 thin film on the LaAlO 3 substrates were measured by XRD θ/2 θ scan, β scan and reciprocal space map. The epitaxial BaTiO 3 thin film on the LaAlO 3 substrates showed a-domain of tetragonal phase with lattice constants of a ⊥=0.3997 nm and a ∥=0.4037 nm. The surface of the epitaxial BaTiO 3 thin film on the LaAlO 3 substrates consisted of round-shaped grains of diameter about 0.1 μm.
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