Abstract
Epitaxial BaTiO3 thin film was prepared on Nb-doped SrTiO3 substrate by coating-pyrolysis process using a mixed solution of barium and titanium naphthenates. The amorphous film pyrolyzed at 470 °C was crystallized with high orientation after heat-treatment at 850 °C under low oxygen partial pressure. X-ray diffraction Θ/2Θ and β scans indicated that the BaTiO3 film was epitaxial relationship with Nb-doped SrTiO3 substrate. The dielectric constant was approximately 230 at 103 Hz and was monotonically decreased with increasing of frequency at room temperature.
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