Preparation and characterization of PbTiO3 thin films by metalorganic chemical vapor deposition on a La0.5Sr0.5CoO3 metallic oxide electrode

Abstract

(001)-oriented PbTiO3 thin films have been grown in situ on La0.5Sr0.5CoO3/SrTiO3 by metalorganic chemical vapor deposition under reduced pressure, while thin films of La0.5Sr0.5CoO3 (LSCO), which is an oxide perovskite metallic material, have been deposited on SrTiO3 substrates by pulse laser deposition. The optimum growth conditions of (001)-oriented PbTiO3 thin films were established. The natures of the films are characterized by X-ray diffraction, optical microscopy and scanning electron microscopy. The acoustic transducers operating at 9.58 GHz were made based on the PbTiO3/LSCO/SrTiO3 heterostructures. The characterization of PbTiO3 thin films shows that the LSCO, at least in some applications such as piezoelectric transducers and resonators, is a suitable electrode material.