Abstract
ABSTRACTFerroelectric superlattice structures composed of three-dimensionally epitaxial PbTiO3 and PLT thin films have been successfully grown on SrTiO3 substrates by metalorganic chemical vapor deposition. The modulation structures were confirmed by θ-2θ XRD, and the excellent in-plane orientational relationship between the superlattice film and the substrate by (100), (110), and (111)-pole figures. The φ-scans through the (110) and (111) reflections were used as additional evidence for three-dimensional epitaxy. The substrate dependence of the epitaxial orientation of PLT and PbTiO3 single-layered thin films was investigated. PbTiO3 thin films with very high crystalline perfection can be successfully grown on KTaO3 substrates.
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