Abstract
Abstract We report on the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. We developed an original process to combine state of the art sol-gel Pb(Zr,Ti)O3 (PZT) thin-films with a highly performing silicon micropump. The device thus takes advantage of both technologies, especially with respect to low voltage actuation and high precision. It can produce μl/min flows for 24 V actuation voltage, opening a new range of applications for low consuming pumps and autonomous microfluidic systems, especially implanted devices for drug delivery.
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