Ferroelectric (Ba,Sr)TiO3 and Pb(Zr,Ti)O3 thin films prepared by pulsed laser deposition

Abstract

Abstract Barium strontium titanate, (Ba, Sr)TiO 3 (BST), and lead zirconium titanate, Pb(Zr, Ti)O 3 (PZT) thin films were synthesized on indium-tin-oxide coated glass substrates using pulsed laser deposition process. Perovskite structure of these materials can be obtained by controlling the substrate temperature at 500–620°C. All the films possess good ferroelectric properties at low frequency regime. When both films were deposited at 500°C and measured at 10 GHz, the dielectric constant is e τ ≅1000 for (Ba, Sr)TiO 3 thin films and is e τ ≅550 for Pb(Zr, Ti)O 3 thin films. Optical transmission spectroscopies show that the Pb(Zr, Ti)O 3 thin films exhibit larger refractive index (( n ) PZT =2.1–2.8) than the (Ba, Sr)TiO 3 thin films (( n ) BST =1.95–2.15), which is ascribed to the heavier mass of the constituents in the Pb(Zr, Ti)O 3 thin films. The (Ba, Sr)TiO 3 thin films also possess much lower absorption coefficient (κ) than the Pb(Zr, Ti)O 3 thin films, which indicates that the (Ba, Sr)TiO 3 thin films contain less intrinsic defects than the Pb(Zr, Ti)O 3 materials.