Abstract
In this paper we report the fabrication of ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Pt-coated SIMOX (Separated-by-IMplanted-OXygen) substrates by pulsed excimer laser deposition combined with rapid thermal annealing. Based on the structural and interfacial characteristics analysis by X-ray diffraction, Rutherford backscattering spectroscopy and transmission electron microscopy, the thin films were revealed to be of polycrystalline perovskite structure with mainly <100> and <110> orientations; the crystallite size and the structure are dependent on the annealing time and temperature. The ferroelectric behaviour of the films was measured
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