Abstract
Parallel femtosecond laser processing with a computer-generated hologram displayed on a spatial light modulator, has the advantages of high throughput and high energy-use efficiency. For further increase of the processing efficiency, we demonstrated parallel femtosecond laser processing with vector-wave control that is based on polarization control using a pair of spatial light modulators. In this paper, we propose a novel laser processing method based on polarization control of parallel pulses. The laser processing system is composed of a pair of SLMs displaying a dynamic CGH, one for making parallel pulses from incoming pulse and the other for controlling the polarization of the diffraction pulse. We demonstrate parallel processing with the different polarization simultaneously. We call this method the vector-wave femtosecond laser processing because of a use of the vector control of polarization. 2. Principle of vector control of laser pulses When Jones matrices of two SLMs, a half-wave plate (HWP), and a quarter-wave plate (QWP) are given as Sα, Sβ, H, and Q, the electric field of the output beam Eout for electric field of an input beam Ein after passing through the optical devices is denoted as,
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