Holographic Vector Wave Femtosecond Laser Processing

Abstract

Parallel femtosecond laser processing using a computer-generated hologram (CGH) displayed on a spatial light modulator (SLM), called holographic femtosecond laser processing, provides the advantages of high throughput and high energy-use efficiency. Use of a light wave with spatially controlled polarization fields, called a vector wave, also offers novel properties in various applications. In this study, we demonstrated holographic femtosecond laser processing with a vector wave by using a pair of SLMs. In particular, we performed three-dimensional reconstruction with multifocal radial beams. We also realized simultaneous reconstruction with two different types of vector beams by using a novel design method of a CGH composed of multiple small CGHs. To our knowledge, this is the first demonstration of its kind. The polarization fields of the multifocal vector beams at the sample plane were analyzed from the orientations of periodic nanostructures fabricated with femtosecond laser light.