Abstract
The design of the ECR ion source was made for an operating frequency of 2.45 GHz. The ion source is considered to be used for producing protons and double charged helium ions. The source construction as well as the separate components design are presented in the study. The operating modes include both ECR and microwave operating regimes. The extraction system with the beamforming was developed. The beam adjustment is implemented by the longitudinal shifting of the electrodes against the plasma electrode position. The performance of the 2.45 GHz waveguide line to provide the stable power injection into the plasma chamber is considered. The numerical simulation of the waveguide line components was made and optimised.
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