Abstract
A formation process for ordered, self-organized cobalt (Co) nanodots in diamond-like carbon (DLC) thin films deposited by magnetron sputtering in a plasma-assisted Ar/CH4 discharge is presented. episilon-Co dots -5 nm in diameter, separated by 1-2 nm DLC boundaries and arranged in hexagonal arrays were produced on Si substrates. The formation mechanism relies on a self-organization process which is based on surface energy minimization and local magnetic field interaction. The proposed plasma-assisted process presents a controlled and cost-effective bottom-up nanofabrication approach for the production of well-ordered magnetic nanodots based on self-organization.
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