Abstract

Nitrogen-doped diamond-like carbon (NDLC) thin films exhibit a high electrical resistivity that is similar to the properties shown by diamond-like carbon (DLC) thin films. The diamond-like transport property in NDLC thin films comes from a material consisting of sp2-bonded carbon versus the sp3-bonded carbon of DLC. In addition, NDLC thin films have a better thermal stability than the DLC thin films, because C:N bonding in the NDLC thin films is stronger against thermal stress than C:H bonding in the DLC thin films. The liquid crystal (LC) alignment effects of ion beam irradiation on the NDLC thin films and the electro optical (EO) performances of the ion-beam-aligned twisted nematic (TN)-liquid crystal display (LCD) with oblique ion beam exposure on an NDLC thin film surface were studied. A good uniform nematic liquid crystal (NLC) alignment with ion beam exposure on the NDLC thin films was observed. In addition, good EO properties, a residual DC property and particularly the good thermal stability of the ion-beam-aligned TN-LCD on NDLC thin films was achieved.

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