Abstract
Aiming at applications of ferroelectric and optical devices, we investigated the fabrication of one-axis-oriented lead zirconate titanate Pb(Zr,Ti)O3 (PZT) thin films on glass substrates with a processing temperature below the glass-transition point of the substrate. Chemical solution deposition (CSD)-derived PZT thin films with a preferential crystal orientation of (00l)/(h00)PZT were grown on an ITO/glass substrate with a crystalline buffer layer of calcium niobate Ca2Nb3O10 (ns-CN). This ns-CN buffer layer lowered the crystallization temperature of the CSD-derived thin films, resulting in crystalline PZT thin films with one-axis (00l) orientation and ferroelectricity of P r = 4 μC cm−2 deposited on transparent glass substrates at a crystallization temperature of 500 °C.
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