Abstract
Performing high-temperature measurements on the rotating parts of aero-engine systems requires wireless passive sensors. Surface acoustic wave (SAW) sensors can measure high temperatures wirelessly, making them ideal for extreme situations where wired sensors are not applicable. This study reports a new SAW temperature sensor based on a langasite (LGS) substrate that can perform measurements in environments with temperatures as high as 1300 °C. The Pt electrode and LGS substrate were protected by an AlN passivation layer deposited via a pulsed laser, thereby improving the crystallization quality of the Pt film, with the function and stability of the SAW device guaranteed at 1100 °C. The linear relationship between the resonant frequency and temperature is verified by various high-temperature radio-frequency (RF) tests. Changes in sample microstructure before and after high-temperature exposure are analyzed using scanning electron microscopy (SEM) and X-ray diffraction (XRD). The analysis confirms that the proposed AlN/Pt/Cr thin-film electrode has great application potential in high-temperature SAW sensors.
Highlights
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Citation: Zhou, X.; Tan, Q.; Liang, X.; Abstract: Performing high-temperature measurements on the rotating parts of aero-engine systems requires wireless passive sensors
To 1300 ◦ C, the resonant frequency of the Surface acoustic wave (SAW) sensor decreases from 158.53 MHz to
When the temperature increases from 25 °C to 1300 °C, the resonant frequency of the SAW sensor decreases from 158.53 MHz to 155.59 MHz, and the resonant frequency changes 2.94 MHz
Summary
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Citation: Zhou, X.; Tan, Q.; Liang, X.; Abstract: Performing high-temperature measurements on the rotating parts of aero-engine systems requires wireless passive sensors. This study reports a new SAW temperature sensor based on a langasite (LGS) substrate that can perform measurements in environments with temperatures as high as 1300 ◦ C. The Pt electrode and LGS substrate were protected by an AlN passivation layer deposited via a pulsed laser, thereby improving the crystallization quality of the Pt film, with the function and stability of the SAW device guaranteed at 1100 ◦ C. The conductive stability of electrodes at high temperatures has become a key factor for determining the suitability of SAW devices, and many researchers have studied the relationship between the conductive performance of metal electrodes at high temperatures and their microstructure. Sakharov et al [14] and Aubert et al [15,16] prepared Ir-based composite electrodes and demonstrated their stable operation above 800 ◦ C
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