Abstract

Novel Surface Acoustic Wave (SAW) devices using the new langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750/spl deg/C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology and were mounted in a high temperature sealed stainless steel chamber for gas testing. The high temperature SAW sensors have been exposed to temperatures from 250/spl deg/C to 750/spl deg/C and cycled more than ten times in that temperature range over periods from two to six weeks. Gas sensing of C/sub 2/H/sub 4/ in N/sub 2/ and H/sub 2/ in N/sub 2/ with baselines of O/sub 2/ and N/sub 2/ on the LGS SAW devices has been performed from 250/spl deg/C to 550/spl deg/C and is reported for the first time in this paper.

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