New structure gas sensor using a modulation-type pyroelectric ir detector

Abstract

Abstract We developed a new structure gas sensor using a new type of pyroelectric IR detector which contains a pyroelectric element (LiTaO3) and a small chopper using a piezoelectric material in the same package. The accuracy of measurement is ±0.2% in the 0 ∼ 20% concentration range of CO2 gas. The change in the output signal is within ±0.5% in a temperature range of 0 ∼ 40°C. The accuracy and stability of the new gas sensor are superior to those of the conventional non-dispersive IR gas sensor due to the new structure and the new type of pyroelectric IR detector.