Abstract
Abstract In the microelectromechanical system, micropump is a very valuable device in various applications like drug delivery, electronics cooling system, etc. Control flow enhancement is the prime motive in the micropump application. In the case of diaphragm based micropump, fluid flow is based on the diaphragm actuation. The piezoelectric diaphragm is used for the control of fluid flow. In this paper new design of the piezoelectric actuator is proposed and compare with the regular circular actuator design and fluid flow analysis. Finite element analysis is carried out using ANSYS 12.1 software for the purpose. Simulation results show that the deflection of the new Strip Piezo Bimorph Disc (SPBD) actuator improves, thus improves the performance of the micropump.
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