Abstract

Up-to-date technology provides the possibility to produce submicron semiconductor devices and highly dense device structures. The classification of the devices is based on the characteristic durations of the processes taking place in them. The dominant or the perturbative nature of the effects depends on the sizes of the system in question. The Boltzmann transport theory can fail with the decrease of dimensions. After some criticism of the fundamental assumptions the limits of the validity of the theory are marked out. The main lines of the quantum transport theory are pointed out and with the help of the superlattices very dense device arrays are described, with indications of the further development of theory and practice.

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