Abstract
A quasi-continuous KrF(B→X) fluorescence of >8 ms pulse duration with 100 Hz operation frequency was observed in a microwave discharge-pumped KrF lamp. The average KrF fluorescence power was 53 W, obtained with an intrinsic efficiency of 8.3% with a 678 W average microwave power deposition. We also obtained a peak KrF fluorescence power of 120 W with a power efficiency of 12.1%.
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