Abstract
KrF(B→X) fluorescence pulses of 5-9-µs pulse duration with 55-kHz operation frequency were produced from a microwave-discharge-pumped KrF mixture. A high average KrF fluorescence power of 43 W was obtained with an intrinsic efficiency of 12.5% when the average microwave power of 341 W was deposited into the 25-Torr mixture of 2%F2/1%Kr/48.5%He/48.5%Ne. We also obtained a peak KrF fluorescence power of 215 W with a power efficiency of 15.9%.
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