Abstract
A quasi-continuous ArF(193 nm:B→X) fluorescence of over 8 ms pulse duration with 100 Hz operation frequency was observed in a microwave-discharge-pumped ArF lamp. The average ArF fluorescence power was 29 W obtained with an intrinsic efficiency of 4.4% with a 655 W average microwave power deposition. A peak ArF fluorescence power of 53 W with a power efficiency of 5.5% was also obtained.
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