Abstract
This study presents overlapping multiple pulse scanning, an alternative approach for forming the microfluidic channels in glass through the interaction of infrared femtosecond laser (FS-laser) irradiation with microjoule-energy pulses. The study employs a scanning-based laser system at a 1035nm wavelength with a pulse duration of 350fs and a repetition rate of 100kHz. In this work, the FS-laser pulses easily induced the dynamics of the optical breakdown process with the laser energy in glass. In addition, a single pulse generates an ablation crater with the irradiation pulse energy of 5@mJ. The study demonstrates that the beam profile, pulse overlap, accumulated fluence, and the number of pulses have the strongest influence on surface morphology to form microfluidic-channels. Herein the surface roughness can be improved to 287nm, and the pulse overlap is 75%. Furthermore, the study analyzes the incubation effect on the number of pulses and the accumulated fluence to confirm the validity of the process model for FS-laser ablation in glass. The technique is useful for prototyping the integrated microfluidic chips that have great potential applications for a lab-on-a-chip.
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