Abstract
Long spiral-shaped microfluidic channels in glass have been fabricated by femtosecond laser direct writing. After hydrofluoric acid etching and post baking, the laser modified regions in glass formed hollow microstructures. The diameter size and the screw-pitch of the channels can be set freely. The experimental results showed that the etched internal surface of the microchannel by hydrofluoric acid will become smoother after the subsequent baking. The incident laser power and scanning speed can also influence the channel quality.
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