Year-end Sale % OFF 
Abstract
A novel differential capacitive accelerometer with a frame-mass structure is presented in the paper. The equivalent circuit model of the accelerometer is simulated with the software SPICE. The accelerometer with the frame-mass can increase the effectual static capacitance. The micro-accelerometer, with the size of 2800×3000×60µm, the static capacitance of 3.618pf, and the inertial mass of 0.14mg, can be implemented in closed-loop system efficiently, and endure overload of 5000g or above. Through the systematic simulation, the accelerometer with the sensitivity of 75mv/g, the full-scale range of 0∼±50g and the system bandwidth of 10 KHz, is supplied with the voltage of 18V.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
