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Abstract
Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.
Highlights
The technology from the last two decades introduced Micro Electro Mechanical Systems (MEMS) in many fields
This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity
Capacitive microaccelerometer has the advantage of low drift, low power consumption, low-temperature dependence, minimal cost and high sensitivity [2]
Summary
The technology from the last two decades introduced Micro Electro Mechanical Systems (MEMS) in many fields. A Capacitive type accelerometer is used instead of piezoelectric to improve the sensitivity. A bulk micromachined in-plane capacitive accelerometer fabricated with an improved process flow, by etching only one-fifth of the wafer thickness at the back of silicon while forming the bar-structure electrode [6]. It greatly lowers the footing effect during deep reactive ion etching (DRIE), and increases the proof mass by 54% compared to the traditional way, resulting in both improved device quality and a higher yield rate [7]. Mechanical sensitivity of an area-changed capacitive accelerometer can be enhanced by optimizing the device geometry. Simulation of the accelerometer can be done using MEMS CAD tools such as Intellisuite 8.6, Coventorware 2001, and Ansys software [8, 9]
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