Abstract
A low power, dual-gate field-effect transistor (FET) hydrogen gas sensor with graphene decorated Pd-Ag for hydrogen sensing applications was developed. The FET hydrogen sensor was integrated with a graphene-Pd-Ag-gate FET (GPA-FET) as hydrogen sensor coupled with Pt-gate FET as a reference sensor on a single sensor platform. The sensing gate electrode was modified with graphene by an e-spray technique followed by Pd-Ag DC/MF sputtering. Morphological and structural properties were studied by FESEM and Raman spectroscopy. FEM simulations were performed to confirm the uniform temperature control at the sensing gate electrode. The GPA-FET showed a high sensing response to hydrogen gas at the temperature of 25~254.5 °C. The as-proposed FET H2 sensor showed the fast response time and recovery time of 16 s, 14 s, respectively at the operating temperature of 245 °C. The variation in drain current was positively related with increased working temperature and hydrogen concentration. The proposed dual-gate FET gas sensor in this study has potential applications in various fields, such as electronic noses and automobiles, owing to its low-power consumption, easy integration, good thermal stability and enhanced hydrogen sensing properties.
Highlights
Hydrogen (H2) is viewed as the best clean energy carriers which are the decisive fossil fuel candidate, with low minimum ignition energy and high heat of combustion[1,2]
The as-proposed H2 sensor shows low power consumption of 45.4 mW at 150 °C, suggesting that the H2 sensor design can attain a thermal isolation with less heat loss by chemical mechanical polishing (CMP)
A facile method to design and fabricate the dual-gate field effect transistor (FET) hydrogen gas sensor was developed with embedded microheater
Summary
Hydrogen (H2) is viewed as the best clean energy carriers which are the decisive fossil fuel candidate, with low minimum ignition energy and high heat of combustion[1,2]. Nanostructures of graphene-Pd-Ag were deposited on the sensing area to develop the H2 gas sensor. The numerical simulation done by FEM explains that the operating temperature of sensing area was controlled well by embedded micro-heater in sensor platform.
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