Abstract
Pressure sensors for high temperatures are extensively applied in a variety of industries processes including aerospace, energy conversion, petrochemicals, automotive and oil wells, real-time pressure detection during equipment operation is a critical concern. Silicon is widely used for piezoresistive sensing with good sensitivity, however, harsh environments with temperatures above 150 °C will lead to plastic deformation as well as current leakage. In this work, AlN/SiCN hybrid thin films systems with ultra-high piezoresistive performance are proposed and enabled by coupling with piezoelectric effect. The gauge factors of the AlN/SiCN sensing elements are from 3260 to 21428 upon different stresses, which are significantly greater than those of other piezoresistive ceramics. The piezoresistive performance of SiCN upon compressive stress is significantly enhanced by incorporation piezoelectric effect of AlN. Moreover, the interfacial strengths of the AlN/SiCN thin films are larger than those of single-layer SiCN, demonstrating that incorporation of AlN layers also improves interfacial strength of SiCN films. This work provides a crucial basis for designing novel piezoresistive sensors.
Published Version
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