Abstract
The results of developing a new universal function describing the lateral distribution of energy losses of an electron beam in a substance are presented for local electron-probe methods, including cathodoluminescence, the method of electron beam induced current (EBIC) in the circuit of a short-circuit diode, and X-ray spectral microanalysis. An analytical expression for the one-dimensional function ?(x) of the distribution of electron energy losses is obtained. It is necessary to calculate the distributions of information signals in the sample surface plane and makes it possible to reliably control the realized spatial resolution of experiments for any materials in a broad range of beam electron energies.
Published Version
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