Abstract
NiO/ β-(Al x Ga1-x )2O3 /Ga2O3 heterojunction lateral geometry rectifiers with diameter 50-100 µm exhibited maximum reverse breakdown voltages >7kV, showing the advantage of increasing the bandgap using the β-(Al x Ga1-x )2O3 alloy. This Si-doped alloy layer was grown by Metal Organic Chemical Vapor Deposition with an Al composition of ~21 %. On state resistances were in the range 50-2180 Ω.cm2, leading to power figures-of-merit up to 0.72 MW.cm-2. The forward turn-on voltage was in the range 2.3-2.5 V, with maximum on/off ratios >700 when switching from 5V forward to reverse biases up to -100V. Transmission line measurements showed the specific contact resistance was 0.12 Ω.cm2. The breakdown voltage is among the highest reported for any lateral geometry Ga2O3-based rectifier.
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