Investigation of Solution Growth of SiC by Temperature Difference Method Using Fe-Si Solvent

Abstract

This paper describes the solution growth of SiC by a temperature difference method using an Fe-Si solvent. Crystal growth of SiC from an Fe-40 mol%Si solvent onto a seed wafer of 6H-SiC or 4H-SiC was carried out at 1623 – 1723 K under induction heating. Homo-epitaxial growth on both 6H-SiC and 4H-SiC was identified by Raman spectroscopy, and the SiC growth rate was found to be 90 – 260 μm/h. Experiments were also conducted under resistance heating at 1623 K using conditions which suppressed natural convection. Convective mass transfer in the solution was found to be important for rapid growth of SiC.