Abstract

Ti L-emission lines of metal-Ti and its oxides are measured by using a soft-X-ray emission spectrometer attached to a scanning electron microscope. Lα,β emissions due to electron transitions from valence 3d states to core 2p levels show a variety of intensity distributions for Ti oxides with different crystal structures reflecting different bonding states. Lℓ,η-emissions are due to transitions from 3s level to 2p levels and show simple intensity distribution. The energy shift of Lℓ,η-emission peak should reflect a relaxation energy in the final state with a hole in 3 s level. The information of L-emission spectrum is discussed based on a chemical shift of photoemission experiment.

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