Abstract
Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.
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